Oak Bluffs, MA old classifieds archive and funnies > By Year
> 2002
> New asm qlto 16-113992C01 outer qlto injector sealed >
New asm qlto 16-113992C01 outer qlto injector sealed >
ASM QLTO 16-113992C01 OUTER QLTO INJECTOR NEW SEALED >
QLTO, A CLASSICAL PROCESS STILL GOING STRONG
An industrial Quartz Low Temperature Oxide (QLTO) process for 150 mm wafers and a guaranteed load of 100 wafers with a diameter of 150 mm in a horizontal tube, hot wall reactor is described. The influence of process parameters and caged cassette design is dealt with. A method of gas injection is described that allows balancing of the profile over the boat. Phosphine (PH3) and Trimethylborate (TMB) were used as source materials for phosphorus and boron doping. FinalIy, particle levels that can be achieved in this process under various conditions are presented.
* INJECTORS ARE APPROX: 89 1/4" LONG
INJECTORS ARE NEW/UNUSED SEALED IN PLASTIC AND CRATED, COME WITH A DOA WARRANTY!
If applicable Arizona residence must pay sales tax unless
you send us a valid tax reseller number. Please send reseller form to:
Systech Inc., 4439 S. 38th Place, Phoenix, AZ 85040 or fax (***)437-1055
to: Systech Inc., 4439 S. 38th Place, Phoenix, AZ 85040
Please E-mail us with your questions to ****@systechaz.com, or our phone
is: (***) 437-0100 or (***) 366-6197, but E-mail is best. Systech Inc. will
Systech Inc. makes no representation of any item sold to be fit for a particular
purpose and assumes no liability for its use or misuse. It is assumed that the
unit will be installed and operated by qualified personnel. The purchaser
agrees that the seller shall not be held responsible or liable for any injuries
or damages, whether incidental or consequential, associated in any way with
Systech Inc. would greatly appreciate hearing from you if anything was wrong
