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Tylan massflow control - fc 260 - gas mix 500 sccm


Description: Designed to meet the requirements of semiconductor processes, the Tylan FC260 is a premium quality elastomer-sealed mass flow controllers and meter. These MFCs combine proven components and techniques with innovative concepts in design.
Tylan FC260 mass flow controllers accurately and reliably measure and control flow rates of gases up to 200 standard liters per minute without the need for pressure or temperature corrections.
This unit has the following specifications:
* Gas: 3% B2H6 + 5% SI H4 in 92% N2



Tylan massflow control - fc 260 - gas mix 500 sccm